Etching of Si and SiNx by Beams Emanating from Inductively Coupled CH3F/O2 and CH3F/CO2 Plasmas

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dc.contributor.advisorDonnelly, Vincent M.
dc.contributor.advisorEconomou, Demetre J.
dc.contributor.committeeMemberStein, Gila E.
dc.contributor.committeeMemberRuchhoeft, Paul
dc.creatorKaler, Sanbir S.
dc.date.accessioned2016-08-21T01:48:02Z
dc.date.available2016-08-21T01:48:02Z
dc.date.createdAugust 2014
dc.date.issued2014-08
dc.date.updated2016-08-21T01:48:02Z
dc.description.abstractIn advanced microelectronic device fabrications, novel gate electrode designs for field effect transistors (FinFETs) require highly anisotropic and selective silicon nitride (SiNx) etching over Si and/or SiO2. SiNx substrates and p-Si on Ge substrates were etched with CH3F/O2 and CH3F/CO2 inductively coupled plasma beams. In addition, polymer films deposited on p-Si and SiNx were characterized and compared via x-ray photoelectron spectroscopy analyses. Optical emission species intensity and species number density of the hydro-fluorocarbon plasma, as a function of % O2 and CO2 addition were compared. Etch and deposition rates were measured on either side of abrupt transitions in gas-phase species concentration, detected at ~ 48 % O2 and ~ 74% CO2. These transition point compositions correspond to a switch from polymer-coated to polymer-free reactor walls.
dc.description.departmentChemical and Biomolecular Engineering, Department of
dc.format.digitalOriginborn digital
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/10657/1451
dc.language.isoeng
dc.rightsThe author of this work is the copyright owner. UH Libraries and the Texas Digital Library have their permission to store and provide access to this work. Further transmission, reproduction, or presentation of this work is prohibited except with permission of the author(s).
dc.subjectSilicon-nitride etching
dc.subjectHydro-fluorocarbon plasmas
dc.titleEtching of Si and SiNx by Beams Emanating from Inductively Coupled CH3F/O2 and CH3F/CO2 Plasmas
dc.type.dcmiText
dc.type.genreThesis
thesis.degree.collegeCullen College of Engineering
thesis.degree.departmentChemical and Biomolecular Engineering, Department of
thesis.degree.disciplineChemical Engineering
thesis.degree.grantorUniversity of Houston
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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