GaN Characterization by X-ray Techniques

dc.contributor.advisorRyou, Jae-Hyun
dc.contributor.committeeMemberSun, Li
dc.contributor.committeeMemberBao, Jiming
dc.creatorWang, Weijie
dc.date.accessioned2017-08-07T21:52:26Z
dc.date.available2017-08-07T21:52:26Z
dc.date.createdAugust 2015
dc.date.issued2015-08
dc.date.submittedAugust 2015
dc.date.updated2017-08-07T21:52:27Z
dc.description.abstractGallium nitride (GaN) is a binary III/V direct bandgap semiconductor. In recent years, due to its unique characteristics such as hard, mechanically stable, superior carrier saturation velocity, high heat capacity, and thermal conductivity, GaN is widely applied in the advanced fabrication of bright light-emitting diodes, optoelectronics, high-power and high frequency electronic devices. However, large differences in the coefficient of thermal expansion and lattice constant between GaN epitaxial layers and a substrate exist. These thermal mismatch and lattice mismatch lead to strain and the generation of defects in the GaN and affect the performance of the devices. Techniques of X-ray diffraction are applied for characterization: reciprocal space mapping is applied to analyze strain and relaxation in epitaxial layers; high resolution rocking curves are applied for dislocation density calculation; and X-ray reflectivity is also applied to characterize the thickness and roughness information. For structural simulation of the GaN-based devices, software LEPTOS is applied.
dc.description.departmentMechanical Engineering, Department of
dc.format.digitalOriginborn digital
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/10657/1988
dc.language.isoeng
dc.rightsThe author of this work is the copyright owner. UH Libraries and the Texas Digital Library have their permission to store and provide access to this work. Further transmission, reproduction, or presentation of this work is prohibited except with permission of the author(s).
dc.subjectGaN
dc.subjectX-ray
dc.subjectDiffraction
dc.titleGaN Characterization by X-ray Techniques
dc.type.dcmitext
dc.type.genreThesis
thesis.degree.collegeCullen College of Engineering
thesis.degree.departmentMechanical Engineering, Department of
thesis.degree.disciplineMechanical Engineering
thesis.degree.grantorUniversity of Houston
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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