• Login
    Search 
    •   Repository Home
    • Electronic Theses and Dissertations
    • Search
    •   Repository Home
    • Electronic Theses and Dissertations
    • Search
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Search

    Show Advanced FiltersHide Advanced Filters

    Filters

    Use filters to refine the search results.

    Now showing items 1-1 of 1

    • Sort Options:
    • Relevance
    • Title Asc
    • Title Desc
    • Issue Date Asc
    • Issue Date Desc
    • Results Per Page:
    • 5
    • 10
    • 20
    • 40
    • 60
    • 80
    • 100

    Thumbnail

    Optimization of Reactive Ion Etching to Fabricate Silicon Nitride Stencil Masks in SF6 Plasma 

    Basu, Prithvi (2013-08)
    Stencil masks are used to print ultra-high resolution patterns using helium ion/atom beam lithography and are often manufactured from thin, free-standing silicon nitride membranes. The masks have sub-200nm openings etched ...

    DSpace software copyright © 2002-2015  DuraSpace
    Contact Us | Send Feedback
    TDL
    Theme by @mire NV
     

     

    Browse

    All of DSpaceCommunities & CollectionsBy Issue DateAuthorsDepartmentsTitlesSubjectsThis CommunityBy Issue DateAuthorsDepartmentsTitlesSubjects

    My Account

    Login

    Discover

    Author
    Basu, Prithvi (1)
    Subject
    Electrical engineering (1)
    Ion Beam Lithography (1)Optimization (1)Reactive Ion Etching (1)Stencil Masks (1)
    Sulfur hexafluoride (1)
    ... View MoreDate Issued2013 (1)

    DSpace software copyright © 2002-2015  DuraSpace
    Contact Us | Send Feedback
    TDL
    Theme by @mire NV