X-ray lithographic source characteristics of neon filled dense plasma focus

Date
1983
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Abstract

The performance of a dense plasma focus (D.P.F.) discharge operating with neon fill is evaluated in connection with its use as an X-ray source for high resolution lithography. Calculations of the power radiated by hot dense plasma having characteristics similar to those produced in the high density phase of the focus are made and the contribution to the total power by line radiation, two and three body recombination, dielectronic recombination and bremsstrahlung are evaluated. [...]

Description
Keywords
Lithography, Dense plasma focus, X-rays
Citation